ForschungPublikationen
Laser ablation of borosilicate glass with high power shaped UV nanosecond laser pulses

Laser ablation of borosilicate glass with high power shaped UV nanosecond laser pulses

Kategorien Konferenz (reviewed)
Jahr 2016
Autoren Von Witzendorff, P.; Bordin, A.; Suttmann, O.; Patel, R.; Bovatsek, J.; Overmeyer, L.
Veröffentlicht in Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350J
Beschreibung

[523]

DOI 10.1117/12.2209313