Laser ablation of borosilicate glass with high power shaped UV nanosecond laser pulses
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2016 |
| Autorinnen/Autoren | Von Witzendorff, P.; Bordin, A.; Suttmann, O.; Patel, R.; Bovatsek, J.; Overmeyer, L. |
| Veröffentlicht in | Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350J |
Beschreibung
[523]
| DOI | 10.1117/12.2209313 |
