ForschungPublikationen
Closed-loop Process Control for Laser Patterning of Thin Film Strain Sensors

Closed-loop Process Control for Laser Patterning of Thin Film Strain Sensors

Kategorien Zeitschriften/Aufsätze (reviewed)
Jahr 2016
Autoren Düsing JF.; Koch, J.; Suttmann,O.; Overmeyer, L.
Veröffentlicht in Procedia Technology vol. 26 , pp. 113-119.
Beschreibung

Abstract This work presents a laser based bridge balancing method for strain sensor circuits
which are applied directly on component surfaces by means of thin film deposition and laser
patterning. The balancing process is integrated in the patterning process and consists of
iterative cycles of laser scanning and bridge measurement operations until a balanced
bridge circuit is generated. It is shown that a balanced bridge circuit on the surface of a non-
planar surface can be generated within few scan cycles, and thus, allows for short ...

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DOI 10.1016/j.protcy.2016.08.016