Laser patterning of thin film sensors on 3-D surfaces

Laser patterning of thin film sensors on 3-D surfaces

Kategorien Zeitschriften/Aufsätze (reviewed)
Jahr 2012
Autoren Overmeyer, L.; Düsing, J. F.; Suttmann, O.; Stute, U.
Veröffentlicht in CIRP Annals - Manufacturing Technology (2012), Article in press

Thinfilm strain sensors applied directly on machine components provide high reliability. However, sensors patterned by standard photolithographic processes are limited to planar surfaces. To overcome these limitations we developed a 3-D capable direct patterning process for NiCr thinfilmsensors based on ultrafast lasers and galvanometer scanners. Our investigations showed that strain sensors with spatial resolution of 30 μm can be patterned on 3-D shaped machine tool components even at extremely tilted surfaces (up to 70°). First machining results and sensor tests indicate that laserthinfilmpatterning enables efficient and automatable production of novel sensor concepts, e.g. for automotive, medical and machine tool applications.

DOI 10.1016/j.cirp.2012.03.087