Direct precision manufacturing of three-dimensional components using organically modified ceramics

The authors report on direct precision manufacturing (DPM) of three-dimensional parts using the stereolithography technique. Organically modified ceramics (Ormocer) are photo polymerised in a layer basedproduction fashion with a custom designed micro stereo lithography (MSL) apparatus. In order to achievespatial process resolutions as high as 10 mm, both the Ormocer and apparatus are adapted in terms ofhigh resolution manufacturing. Using micro computer tomography, form tolerances smaller than 50 mmare achieved. Through the highest degree of flexibility in three-dimensional manufacturing, new fields ofapplications in the MEMS sector are conceivable, as exemplary micro mechanical or micro fluidicsystems.